Rotatable Offner imaging system for ellipsometric measurement
نویسندگان
چکیده
منابع مشابه
Analytical design of an Offner imaging spectrometer.
We present the analytical design of an imaging spectrometer based on the three-concentric-mirror (Offner) configuration. The approach presented allows for the rapid design of this class of system. Likewise, high-optical-quality spectrometers are obtained without the use of aberration-corrected gratings, even for high speeds. Our approach is based on the calculation of both the meridional and th...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2017
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4973778